این مجموعه شامل فیلم های اموزشی درس طراحی مدارات MEMS (Micro Electro Mechanical System) از دانشگاه کلرادو (سال 2010) می باشد که توسط پرفسور Clark Tu-Cuong Nguyen تدریس می شود و به صورت یک دی وی دی ارائه شده است .
Lecture
1: Administrative Information, MEMS Roadmaps, Benefits of Miniaturization
Lecture 2: Benefits of Scaling I: faster speed (transistors, micromechanical
resonators)
Lecture 3: Benefits of Scaling II: lower power consumption (micro-ovens), higher
sensitivity (gas sensors)
Lecture 4: Benefits of Scaling III
Lecture 5: Process Modules I: Oxidation and Film Deposition
Lecture 6: Process Modules II: Oxidation, Film Deposition, Lithography Etching,
and Doping
Lecture 7: Process Modiles III: Lithography, Etching, and Doping
Lecture 8: Surface Micromachining: Lithography, Etching and Doping
Lecture 9: Surface Micromachining II
Lecture 10: Surface Micromachining and Surface Micromachining III
Lecture 11: Mechanics of Materials for MEMS II: quality factor, beam bending
Lecture 12: Mechanics of Materials III: practical stress, beam combos, stressed
folded flexures
Lecture 13: Energy Methods I: virtual work, energy formulations, tapered beam
example
Lecture 14: Energy Methods II: clamped-clamped beam example, large deflection
analysis, estimating resonance frequency
Lecture 15: Equivalent Circuits I: dynamic mass, stiffness, and damping,
example: free-free beam, lumped mass-spring-damper circuit
Lecture 16: Equivalent Circuits II: electromechanical analogies, lossless
transducers
Lecture
17: Lossless Transducers I: capacitive transducers, charge control, voltage
control, spring suspend C, parallel-plate capacitive transducer, pull-in
linearization
Lecture 18: Lossless Transducers II: electrical stiffness, comb drive, levitatio
Lecture 19: Equivalent Circuits III: input modeling, force-to-velocity
relationship and circuit, intro. to gyroscopes
Lecture 20: Equivalent Circuits IV: output modeling, input-to-output
transconductance, complete equivalent circuit
Lecture 21: Sensing Circuits I: ideal op amps, velocity sensing, position
sensing
Lecture 22: Sensing Circuits II: differential position sensing, MEMS/transistor
integration
Lecture 23: Sensing Circuits III: non-ideal op amps, begin noise
Lecture 24: Sensor Resolution I: noise sources, noise calculation, min.
detectable signal
Lecture 25: Sensor Resolution II: noise calculation examples, gyro example
Lecture 26: MEMS-Transistor Integration mixed, MEMS-first, MEMS-last
مجموعه فیلم های آموزشی درس طراحی مدارات MEMS | دانشگاه بروکلی
- دسته بندی ها:
- - فیلم های آموزشی
- کد محصول: ZD_000_07022
- موجودی: 10
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قیمت پایه : 230,000ریال